High Performance FKM

ARMOR CRYSTAL

Armor Crystal

Excellent Purity
Low outgassing
Low metal impurity content
Low particle generation
Resistance to plasma

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ULTIC ARMOR

Ultic Armor

Excellent for dynamic sealing
Heat resistance
Low adhesion to metal and quartz
Resistance to cleaning gas
Resistance to plasma
Low metal impurity content
Low particle generation

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ULTIC ARMOR-F

Ultic Armor-F

High radical resistance
High crack resistance
FKM with no fillers
Excellent mechanical properties for dynamic locations.

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REBLIC ARMOR

REBLIC ARMOR

Inorganic Filler Free Type FKM
Excellent Plasma Resistance
Excellent Adhesion Properties
Low Hardness

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DC156

DC156

Crack resistant
Plasma/radical resistance
Less adhesion to metal

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HYREC ARMOR

Hyrec Armor

Excellent purity
Heat resistance
Low adhesion
Low metal impurity content
Low particle generation
Resistance to plasma

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SPOQ ARMOR

Spoq Armor

Excellent for dynamic sealing
Less adhesive to Quartz
Low metal impurity content
Resistance to plasma

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DS403

DS403

Better crack resistance than FKM
Plasma resistance comparable to FFKM

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SILTY ARMOR

SILTY ARMOR

Very pure with low inorganics ppb content
Improved weight loss resistance

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LABE ARMOR

Labe Armor

Heat resistant
Resistance to O2 plasma
Less-adhessive to Quartz

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ARCURY Series

Arcury Series

Heat resistant
Resistance to O2 plasma
Less-adhessive to Quartz

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TS Seal

TS Seal

Reduces twisting and migrating due to triangular "key-in" groove. Wide base reduces misalignment from shock and friction by 50%.

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