Excellent Purity
Low outgassing
Low metal impurity content
Low particle generation
Resistance to plasma
Excellent for dynamic sealing
Heat resistance
Low adhesion to metal and quartz
Resistance to cleaning gas
Resistance to plasma
Low metal impurity content
Low particle generation
High radical resistance
High crack resistance
FKM with no fillers
Excellent mechanical properties for dynamic locations.
Inorganic Filler Free Type FKM
Excellent Plasma Resistance
Excellent Adhesion Properties
Low Hardness
Excellent purity
Heat resistance
Low adhesion
Low metal impurity content
Low particle generation
Resistance to plasma
Excellent for dynamic sealing
Less adhesive to Quartz
Low metal impurity content
Resistance to plasma
Better crack resistance than FKM
Plasma resistance comparable to FFKM
Very pure with low inorganics ppb content
Improved weight loss resistance
Heat resistant
Resistance to O2 plasma
Less-adhessive to Quartz
Reduces twisting and migrating due to triangular "key-in" groove. Wide base reduces misalignment from shock and friction by 50%.
