FKM provides high heat and oil resistance with excellent compression sets.
Good for: Diffusion, CVD, Etch, PVD
Provides high purity, less adhesion and plasma-resistance with Valqua's with Valqua’s unique elastomer technology.
Good for: Etch, CVD, PVD
FLUORITZ is a type of perfluoroelastmer (FFKM). It has good chemical resistance to cover a wide temperature range because of its chemical stability, and also an excellent seal for high temperatures.
Good for: Etch, Diffusion, CVD, Asher
The combination of PTFE and FKM provides excellent sealing performance as well as radical resistance
Good for: Etch, CVD
Bonded Gate Series has great physical characteristics. High anti-cracking and plasma resistance make them well suited for gate locations.
Good for: CVD, PVD, Etch
We have achieved precise machining and superior welding workmanship by using our long time experience as a leading manufacture of PTFE/PFA products.
Good for: Various applications
Metal seals are suited for high temperature and high pressure applications.
Good for: Metal CVD
As a pioneer of bellows manufacturing in Japan, our superior workmanship has created the ultra high vacuum and contamination free seals.
Good for: Various applications
The fluorine enhanced thermal conductive sheets exhibit excellent heat and radical resistance, while facilitating heat transfer for more uniform heat distribution. Available in a variety of hardness, thickness, and sizes.
Good for: Various applications
