The Bonded Gate Seal, with its patented design, avoids metal to metal contact, minimizes the seal area exposed to plasma, and maintains stable sealing performance to extend seal lifetime. Bonded Gates are available with:
Ultic Armor - High purity, particle free
DS403 - Crack resistant, excellent plasma resistance
The M-move's design is engineered to minimize wear, providing excellent resistance for stress loads. The M-move is available with:
Ultic Armor - High purity, particle free
Fluoritz T20 - Perfluoro-elastomer material with excellent radical resistance
